Gerold W. Neudeck and Robert F. Pierret, Editors. Volume V. Introduction to Microelectronic. Fabrication. Second Edition. Richard C. Jaeger. Auburn University. ation – Free ebook download as PDF File .pdf) or A good book for Introduction to Microfabrication followed by Auburn University. . Manufacturing and Process Control – G. May, C. Spanos (Wiley, ) WW. Gerold W. Neudeck and Robert F. Pierret, Editors Volume V Introduction to Microelectronic Fabrication Second Edition Richard C. Jaeger Auburn University.
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Dude marked it as to-read Jan 15, The second edition includes an entirely new chapter on MEMS, as well as substantial modifications to the chapters on MOS and bipolar process integration.
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Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices
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Introduction to microelectronic fabrication / Richard C. Jaeger – Details – Trove
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